多層結構之氮化鋁及氧化鈦生醫感測晶片之應用

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Taipei Medical University Institutional Repository > 口腔醫學院 > 生醫材料暨組織工程研究所 > 博碩士論文 > Item 987654321/57657

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題名:	多層結構之氮化鋁及氧化鈦生醫感測晶片之應用 Aapplication of aluminum nitride/titanium oxide on biosensing system
作者:	洪千惠 Hung, Chien-Hui
貢獻者:	生醫材料暨工程研究所歐耿良吳其昌
關鍵詞:	氮化鋁鈦薄膜;絕緣體金屬;骨整合 Al-N thin films;metal-insulator-metal;osseointegration
日期:	2011-06-19
上傳時間:	2019-06-11 12:26:37 (UTC+8)
摘要:	The microstructural properties and functional failure of Al-N thin films metal-insulator-metal (MIM) capacitors fabricated by rf sputtering system were studied for the application as biosensing of osseointegration. The film properties and capacitor capability of Al-N films with and without cell culture were determined using glancing incident X-ray diffraction (GIXRD), leakage current density, cross-sectional transmission electron microscopy (XTEM), and stress analysis as well as biocompatibility test. The as-deposited Al film has a face-center cubic structure and a low resistivity of 3.21cm. With increasing nitrogen concentration of Al-N films, phase transformations are identified as fcc-Al ?_ ??-Al(N) ?_ β-Al(N) ?_ fcc-AlNh hcp-AlN. AlN. As the testing result of MIM capacitor, it was manifested that the failure of the AlN MIM capacitors was caused microvoids formed on the film after cell culture. The microvoid having occurred at the cell/AlN MIM capacitor caused it to leak out much of the current to the extent of a few microamperes even at 138k V/cm. The formation of microvoid and low break down voltage was explained by the stress variation during the cell differentiation and proliferation. The stress induced by interaction bone cell and hcp-AlN film resulted in lattice and/or atomic displacement and distortion of AlN. It is believed that the [002] oriented AlN film is shown to perform effectively as a biosensing film to detect the cell differentiation and proliferation by MIM capacitor device. Furthermore, the biosensing film will have a potential for use in wireless technology to monitor the osseointegration in the future
描述:	碩士指導教授-歐耿良共同指導教授-吳其昌委員-劉沖明委員-李九龍委員-游信強
資料類型:	thesis
顯示於類別:	[生醫材料暨組織工程研究所] 博碩士論文

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